Publication

A novel CMOS SOI unbalanced Mach-Zehnder interferometer: from design and simulations to fabrication and characterization

Mihai Adrian Ionescu, Luc Thévenaz, Philippe Renaud, Cyrille Hibert, Paolo Giuseppe Dainesi, Philippe Flückiger, Georges-André Racine
2001
Conference Papers

Abstract

This paper reports on a novel, simple yet reliable, unbalanced SOI Mach-Zehnder (M-Z) interferometer architecture based on 1.2 μm CMOS process and adapted post-processing for the waveguide sidewalls. The fabricated electro-optical device is based on multiple PIN diode bars integrated on top of a SOI silicon waveguide and can be operated either at: (I) high-frequency (few MHz) based on the plasma dispersion effect and (II) low frequency (

Official source

https://infoscience.epfl.ch/entities/publication/af1f3696-166b-45a4-9a14-e8c60a773cfb

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A novel CMOS SOI unbalanced Mach-Zehnder interferometer: from design and simulations to fabrication and characterization

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