YBAR resonators for biosensing Channels in Silicon

This semester project, conducted in the Advanced NEMS Laboratory at EPFL, focused on the development and fabrication of microfluidic channels integrated with film bulk acoustic resonators (FBAR) for future biosensing applications. The primary objective was to create channels within a silicon wafer and seal them with a PDMS lid to ensure proper fluid introduction and containment. The fabrication process involved advanced techniques, including photolithography, dry etching, and PDMS molding. Two designs were tested for their ability to facilitate liquid flow through the channels. While one design successfully allowed fluid flow, demonstrating the feasibility of the microfluidic integration, the other design failed to achieve the desired results. This project lays the groundwork for future tests involving the resonators, as the successful channel design ensures proper fluidic integration essential for biosensing applications.