Publication

Analysis of resonant planar dissipative network antennas for rf inductively coupled plasma sources

Christoph Hollenstein, Alan Howling, Philippe Frédérique Bruno Guittienne
2014
Journal Articles

Abstract

The analysis of a radio-frequency (RF) planar antenna is presented for applications in plasma processing. The antenna is a network of elementary meshes composed of inductive and capacitive elements which exhibits a set of resonant modes. The high currents generated by RF power feeding under resonance are efficient for plasma generation. A general solution is derived for the currents in the driven dissipative network for these conditions. The dominantly real input impedance near antenna resonance avoids the high reactive currents and voltages in the matching box and RF power connections which can be a problem with conventional large-area capacitively and inductively coupled plasma sources. The driven antenna can be approximated by a parallel resonance equivalent circuit whose input impedance can conveniently be measured to interpret the dissipation due to the plasma.

Official source

https://infoscience.epfl.ch/entities/publication/addcdb3d-cc81-47ef-9800-40a5ba9904b8

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Christoph Hollenstein, Alan Howling, Philippe Frédérique Bruno Guittienne
2014
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/addcdb3d-cc81-47ef-9800-40a5ba9904b8

About this result

Related concepts (32)

Antenna array

An antenna array (or array antenna) is a set of multiple connected antennas which work together as a single antenna, to transmit or receive radio waves. The individual antennas (called elements) are usually connected to a single receiver or transmitter by feedlines that feed the power to the elements in a specific phase relationship. The radio waves radiated by each individual antenna combine and superpose, adding together (interfering constructively) to enhance the power radiated in desired directions, and cancelling (interfering destructively) to reduce the power radiated in other directions.

Dipole antenna

In radio and telecommunications a dipole antenna or doublet is the simplest and most widely used class of antenna. The dipole is any one of a class of antennas producing a radiation pattern approximating that of an elementary electric dipole with a radiating structure supporting a line current so energized that the current has only one node at each end. A dipole antenna commonly consists of two identical conductive elements such as metal wires or rods.

Resonance

Resonance describes the phenomenon of increased amplitude that occurs when the frequency of an applied periodic force (or a Fourier component of it) is equal or close to a natural frequency of the system on which it acts. When an oscillating force is applied at a resonant frequency of a dynamic system, the system will oscillate at a higher amplitude than when the same force is applied at other, non-resonant frequencies. Frequencies at which the response amplitude is a relative maximum are also known as resonant frequencies or resonance frequencies of the system.

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Analysis of resonant planar dissipative network antennas for rf inductively coupled plasma sources

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