Publication

SUB-MICRON SCALE PATTERN TRANSFER INTO POLYMERS BY THERMAL IMPRINT LITHOGRAPHY

Christian Santschi
2006
Reports

Abstract

Nanoimprint lithography (NIL) is an emerging patterning technology which shows the capability of fabricating nanostructures on a large scale. It is therefore interesting for low-cost NEMS manufacturing. As schematically shown, a stamp made of single crystalline silicon is pressed into a thermoplastic polymer at a temperature above its glass transition temperature TG. After the cavities of the stamp are filled with the polymer, the stamp is removed at a temperature below TG. The resulting residual layer can be removed by anisotropic dry etching, if necessary. Our goal is first to find suitable process parameters for the existing equipment in CMI and to establish a NIL process line. We have succeeded to replicate structures into thin polymer layers reproducibly with sub-micron feature sizes on a wafer scale. This technology will serve as a basis for a variety of applications and a research tool in the sub-micron range.

Official source

https://infoscience.epfl.ch/entities/publication/ab3e9210-9e2c-4e04-814b-14a4b320b341

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Christian Santschi
2006
Reports

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/ab3e9210-9e2c-4e04-814b-14a4b320b341

About this result

Related concepts (32)

Photolithography

In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate.

Nanoimprint lithography

Nanoimprint lithography (NIL) is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint resist is typically a monomer or polymer formulation that is cured by heat or UV light during the imprinting. Adhesion between the resist and the template is controlled to allow proper release.

Polymer

A polymer (ˈpɒlᵻmər; Greek poly-, "many" + -mer, "part") is a substance or material consisting of very large molecules called macromolecules, composed of many repeating subunits. Due to their broad spectrum of properties, both synthetic and natural polymers play essential and ubiquitous roles in everyday life. Polymers range from familiar synthetic plastics such as polystyrene to natural biopolymers such as DNA and proteins that are fundamental to biological structure and function.

Related publications (32)

SUB-MICRON SCALE PATTERN TRANSFER INTO POLYMERS BY THERMAL IMPRINT LITHOGRAPHY

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