Publication

LTCC Gas-Viskositätssensor

Thomas Maeder, Peter Ryser, Giancarlo Corradini
2007
Conference Papers

Abstract

Dieser Beitrag befasst sich mit einem Viskositätssensor für die Identifikation von Gasen (insbesondere Brenngase). Der Sensor wird aus strukturiertem LTCC (Low Temperature Cofired Ceramic) gefertigt, und besteht aus drei Elementen: 1) Eine beheizte Kavität, 2) eine Membran für Druckmessung, und 3) ein Mäander ("fluidischer Widerstand" / Lecknormal). Im Betrieb wird die Kavität periodisch aufgeheizt und abgekühlt. Dadurch entstehen periodische Über- und Unterdruckpulse, die durch das Lecknormal abfallen und mittels der Membran kontinuierlich gemessen werden. Die Viskosität kann dann durch die entsprechende Zeitkonstante ermittelt werden. Der Sensor arbeitet völlig thermisch (auch die Druckmessung), was mit einfacher Elektronik kompatibel ist und auch die Messung der thermischen Leitfähigkeit erlaubt.

Official source

https://infoscience.epfl.ch/entities/publication/aabacd02-6b01-4bb7-b9ae-166f8daed68d

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Thomas Maeder, Peter Ryser, Giancarlo Corradini
2007
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/aabacd02-6b01-4bb7-b9ae-166f8daed68d

About this result

Related concepts (2)

Co-fired ceramic

Co-fired ceramic devices are monolithic, ceramic microelectronic devices where the entire ceramic support structure and any conductive, resistive, and dielectric materials are fired in a kiln at the same time. Typical devices include capacitors, inductors, resistors, transformers, and hybrid circuits. The technology is also used for robust assembly and packaging of electronic components multi-layer packaging in the electronics industry, such as military electronics, MEMS, microprocessor and RF applications.

Ceramic capacitor

A ceramic capacitor is a fixed-value capacitor where the ceramic material acts as the dielectric. It is constructed of two or more alternating layers of ceramic and a metal layer acting as the electrodes. The composition of the ceramic material defines the electrical behavior and therefore applications. Ceramic capacitors are divided into two application classes: Class 1 ceramic capacitors offer high stability and low losses for resonant circuit applications.