Publication

Méthode de libération d'une pièce micromécanique et pièce micromécanique comprenant des attaches sacrificielles

Simon Nessim Henein, Johannes Richard Cornelis Geerit Kruis
2013
Patents

Abstract

A method for fabricating a micromechanical part from a substrate in which the part is fabricated by providing a plurality of fasteners between the part and the substrate, the fasteners being sacrificial, characterized in that the fasteners include at least one hinge at the end of each fastener located beside the part, and in that the method includes a step of breaking the sacrificial fasteners. The micromechanical parts employing this type of sacrificial fastener are also described.

Official source

https://infoscience.epfl.ch/entities/publication/9f0a5dfc-bacf-4e6d-aab0-05e62df40d1e

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Méthode de libération d'une pièce micromécanique et pièce micromécanique comprenant des attaches sacrificielles

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