A Microfabricated 1-D Metamaterial Unit Cell Matched From DC to Millimeter-Waves

A silicon-integrated one-dimensional CRLH-TL metamaterial unit cell is presented. Ultra broadband behavior is achieved by implementing the previously proposed 'lattice network' CRLH-TL unit cell in a monolayer host transmission line, as required for simple micromachining fabrication. Measurements demonstrate a so-called balanced composite right/left-handed behavior from 5 to 35 GHz, with a transition zero-phase frequency at 20 GHz. The lower measured frequency of 5 GHz is limited by the on-wafer calibration but the very principle of the 'lattice network' CRLH-TL guaranties its operation down to dc.