Publication

High Precision Robotics System for Scanning Electron Microscopes

Jean-Marc Breguet
2004
Conference Papers

Abstract

In this paper we present our latest developments in high precision positioning and handling systems operating inside an SEM. The Laboratory in Scanning Electron Microscope concept (LAB-in-SEM) is proposed along with a description of our piezodriven manipulators. Nano-material testing such as in-situ indentation and scratch have been conduct with our systems and are briefly related here. Finally, the preliminary tests of the tele-operated assembly of carbon nanotubes on AFM tips are described.These results will permit the development of an automatic nanotubes assembly system.

Official source

https://infoscience.epfl.ch/entities/publication/9b52f54b-2fee-426b-9c12-87c0c43b0372

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Jean-Marc Breguet
2004
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/9b52f54b-2fee-426b-9c12-87c0c43b0372

About this result

Related concepts (31)

Scanning electron microscope

A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample. The electron beam is scanned in a raster scan pattern, and the position of the beam is combined with the intensity of the detected signal to produce an image.

Scanning tunneling microscope

A scanning tunneling microscope (STM) is a type of microscope used for imaging surfaces at the atomic level. Its development in 1981 earned its inventors, Gerd Binnig and Heinrich Rohrer, then at IBM Zürich, the Nobel Prize in Physics in 1986. STM senses the surface by using an extremely sharp conducting tip that can distinguish features smaller than 0.1 nm with a 0.01 nm (10 pm) depth resolution. This means that individual atoms can routinely be imaged and manipulated.

Low-voltage electron microscope

Low-voltage electron microscope (LVEM) is an electron microscope which operates at accelerating voltages of a few kiloelectronvolts or less. Traditional electron microscopes use accelerating voltages in the range of 10-1000 keV. Low voltage imaging in transmitted electrons is possible in many new scanning electron detector. Low cost alternative is dedicated table top low voltage transmission electron microscope.

Related publications (27)

High Precision Robotics System for Scanning Electron Microscopes

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