Publication

Wafer-Scale Processing of Ultra-Low-Loss Gallium Phosphide Integrated Photonics

Tobias Kippenberg, Nikolai Kuznetsov
2024

Abstract

We demonstrate wafer-scale processing of integrated photonic circuits made of gallium phosphide, with propagation losses in waveguides as low as 0.40 dB/cm, and establish new record-high quality factors with resonators on this material platform.

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Wafer-Scale Processing of Ultra-Low-Loss Gallium Phosphide Integrated Photonics

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