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We demonstrate dissipation dilution engineering techniques for ultralow dissipation mechanical resonators. The Si3N4 nanobeams show quality factors (Q) as high as 800 million and Q x f exceeding 10(15) Hz-both records at room temperature. (C) 2019 The Author(s)
Tobias Kippenberg, Guanhao Huang, Nils Johan Engelsen, Alberto Beccari
Thomas Keller, Lulu Liu, Abdolvahid Movahedirad