Publications related to Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication

Related publications (36)

Co-annealing of PECVD boron emitters and poly-Si passivating contacts for leaner TOPCon solar cell fabrication

Christophe Ballif, Franz-Josef Haug, Sofia Libraro, Julien Hurni, Ezgi Genç

This study investigates the feasibility of a single-step annealing process for tunnel oxide passivating contact (TOPCon) solar cell fabrication to replace the conventional two-step approach. We present a novel method using a single thermal treatment to sim ...

2025

Nanostructure and Optical Property Tailoring of Zinc Tin Nitride Thin Films through Phenomenological Decoupling: A Pathway to Enhanced Control

Aïcha Hessler-Wyser, Johann Michler, Caroline Hain, Daniele Casari

This work addresses the need for precise control of thin film sputtering processes to enable thin film material tailoring on the example of zinc tin nitride (ZTN) thin films deposited via microwave plasma-assisted high power reactive magnetron sputtering ( ...

Amer Chemical Soc2024

Optimizing Atomic Layer Deposition Processes with Nanowire-Assisted TEM Analysis

Ivo Utke, Johann Michler, Xavier Maeder

Atomic layer deposition (ALD) is one of the premier methods to synthesize ultra-thin materials on complex surfaces. The technique allows for precise control of the thickness down to single atomic layers, while at the same time providing uniform coverage ev ...

Wiley2024

Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

Federico Peretti, Luis Guillermo Villanueva Torrijo, Silvan Stettler, Marco Liffredo, Nan Xu

Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary t ...

2024

Font Side Solutions for c-Si Solar Cells with High-Temperature Passivating Contacts

Ezgi Genç

In this work, we studied the potential of using thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) for two main purposes: introducing an n-type passivating contact at the front of a TOPCon solar cell, or simplifying the fabrication o ...

EPFL2024

Investigating laser beam shadowing and powder particle dynamics in directed energy deposition through high-fidelity modelling and high-speed imaging

Christian Leinenbach

Laser beam shadowing in directed energy deposition process occurs when in-flight powder particles partially block the laser beam, preventing it from fully reaching the melt pool. This blockage alters the beam's profile, introducing spatio-temporal randomne ...

ELSEVIER2024

Colloidal Atomic Layer Deposition on Nanocrystals Using Ligand-Modified Precursors

Raffaella Buonsanti, Anna Loiudice, Petru Pasquale Albertini, Ona Segura Lecina, Philippe Benjamin Green, Jari Leemans, Mark Adrian Newton, Coline Marie Agathe Boulanger, Krishna Kumar

Atomic layer deposition (ALD) is a method to grow thin metal oxide layers on a variety of materials for applications spanning from electronics to catalysis. Extending ALD to colloidally stable nanocrystals promises to combine the benefits of thin metal oxi ...

Amer Chemical Soc2024

Direct synthesis of nanocrystalline single-layer porous graphene for hydrogen sieving

Kumar Varoon Agrawal, Mojtaba Chevalier, Luc Sébastien Bondaz, Jian Hao, Ceren Kocaman

Porous single -layer graphene is promising as the selective layer for membrane-based gas separation thanks to the atomic thickness of the pore which can yield high permselective flux. Direct synthesis of porous graphene by chemical vapor deposition (CVD) i ...

Pergamon-Elsevier Science Ltd2024

Towards Scalable Electronics: Synthetic 2D Materials for Large-Area 2D Circuit Integration

Zhenyu Wang

In the past decades, a significant increase of the transistor density on a chip has led to exponential growth in computational power driven by Moore's law. To overcome the bottleneck of traditional von-Neumann architecture in computational efficiency, effo ...

EPFL2024

Oligolithic Cross-task Optimizations across Isolated Workloads

Anastasia Ailamaki, Panagiotis Sioulas, Eleni Zapridou

Enterprises collect data in large volumes and leverage them to drive numerous concurrent decisions and business processes. Their teams deploy multiple applications that often operate concurrently on the same data and infrastructure but have widely differen ...

2024

Advancing high-throughput combinatorial aging studies of hybrid perovskite thin films via precise automated characterization methods and machine learning assisted analysis

Christian Michael Wolff, Austin George Kuba

To optimize material stability, automated high-throughput workflows are of increasing interest. However, many of those workflows either employ synthesis techniques not suitable for large-area depositions or are carried out in ambient conditions, which limi ...

Royal Society of Chemistry2024

Influence of Ventilation on Formation and Growth of 1-20 nm Particles via Ozone-Human Chemistry

Dusan Licina, Shen Yang, Marouane Merizak, Meixia Zhang

Ozone reaction with human surfaces is an important source of ultrafine particles indoors. However, 1-20 nm particles generated from ozone-human chemistry, which mark the first step of particle formation and growth, remain understudied. Ventilation and indo ...

Amer Chemical Soc2024

Scanning Tunneling Microscopy for Molecules: Effects of Electron Propagation into Vacuum

Klaus Kern, Abhishek Grewal

Using scanning tunneling microscopy (STM), we experimentally and theoretically investigate isolated platinum phthalocyanine (PtPc) molecules adsorbed on an atomically thin NaCl(100) film vapor deposited on Au(111). We obtain good agreement between theory a ...

Amer Chemical Soc2024

Modified capillary number to standardize droplet generation in suction-driven microfluidics

Jatin Panwar

In droplet microfluidic devices with suction-based flow control, the microchannel geometry and suction pressure at the outlet govern the dynamic properties of the two phases that influence the droplet generation. Therefore, it is critical to understand the ...

Springer Heidelberg2024

Strategy to systematically design and deploy the ITER plasma control system: A system engineering and model-based design approach

Richard Pitts, Federico Alberto Alfredo Felici, Federico Pesamosca, Anna Ngoc Minh Trang Vu

The paper details the process of developing the ITER Plasma Control System (PCS), that is, how to design and deploy it systematically, in the most efficient and effective manner. The integrated nature of the ITER PCS, with its multitude of coupled control ...

Elsevier Science Sa2024

A semantic model-based systems engineering approach for assessing the operational performance of metal forming process

Dimitrios Kyritsis, Jinzhi Lu

Metal Forming is a basic and essential industrial process to provide materials for constructing complex products. To design an efficient metal forming process, the functional requirements and operational performance are two important aspects to be consider ...

Pergamon-Elsevier Science Ltd2024

Controlled Formation of Nanoribbons and Their Heterostructures via Assembly of Mass-Selected Inorganic Ions

Klaus Kern

Control of nanomaterial dimensions with atomic precision through synthetic methods is essential to understanding and engineering of nanomaterials. For single-layer inorganic materials, size and shape controls have been achieved by self-assembly and surface ...

Wiley-V C H Verlag Gmbh2024

Optical Monitoring of Water Side Permeation in Thin Film Encapsulation

Yves Leterrier, Stéphanie Lacour, Massimo Mariello, Kangling Wu

The stability of long-term microfabricated implants is hindered by the presence of multiple water diffusion paths within artificially patterned thin-film encapsulations. Side permeation, defined as infiltration of molecules through the lateral surface of t ...

Wiley-V C H Verlag Gmbh2024

Microstructural and electrical characterization of high temperature passivating contacts for silicon solar cells

Sofia Libraro

Recombination at metal/semiconductor interfaces represents the main limitation in mainstream c-Si solar cells, primarily based on the passivated emitter and rear cell (PERC) concept. Full-area passivating contacts based on SiOx/poly-Si stacks are a candida ...

EPFL2024

Plasmoid drift and first wall heat deposition during ITER H-mode dual-SPIs in JOREK simulations

Mengdi Kong

The heat flux mitigation during the thermal quench (TQ) by the shattered pellet injection (SPI) is one of the major elements of disruption mitigation strategy for ITER. It's efficiency greatly depends on the SPI and the target plasma parameters, and is ult ...

IOP Publishing Ltd2024