Publication

Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

Nava Setter, Paul Muralt, Dragan Damjanovic
1994
Conference Papers

Abstract

The piezoelectric properties of lead zirconate titanate (PZT) thin ﬁlms deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the piezoelectric response is discussed. The study of the dielectric permittivity and the loss as a function of the amplitude of the alternating electric field reveals that extrinsic contributions to the dielectric permittivity become active at large fields. The DC electric field has the effect of freezing out the extrinsic contributions. The inﬂuence of the dielectric loss on the piezoelectric properties is discussed.

Official source

https://infoscience.epfl.ch/entities/publication/956ad76e-35b5-493a-9a66-b40cb34525f6

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Nava Setter, Paul Muralt, Dragan Damjanovic
1994
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/956ad76e-35b5-493a-9a66-b40cb34525f6

About this result

Related concepts (32)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Lead zirconate titanate

Lead zirconate titanate, also called lead zirconium titanate and commonly abbreviated as PZT, is an inorganic compound with the chemical formula It is a ceramic perovskite material that shows a marked piezoelectric effect, meaning that the compound changes shape when an electric field is applied. It is used in a number of practical applications such as ultrasonic transducers and piezoelectric resonators. It is a white to off-white solid. Lead zirconium titanate was first developed around 1952 at the Tokyo Institute of Technology.

Dielectric

In electromagnetism, a dielectric (or dielectric medium) is an electrical insulator that can be polarised by an applied electric field. When a dielectric material is placed in an electric field, electric charges do not flow through the material as they do in an electrical conductor, because they have no loosely bound, or free, electrons that may drift through the material, but instead they shift, only slightly, from their average equilibrium positions, causing dielectric polarisation.

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Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

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