MEMSMEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.
Electrical conductorIn physics and electrical engineering, a conductor is an object or type of material that allows the flow of charge (electric current) in one or more directions. Materials made of metal are common electrical conductors. The flow of negatively charged electrons generates electric current, positively charged holes, and positive or negative ions in some cases. In order for current to flow within a closed electrical circuit, one charged particle does not to travel from the component producing the current (the current source) to those consuming it (the loads).
Sputter depositionSputter deposition is a physical vapor deposition (PVD) method of thin film deposition by the phenomenon of sputtering. This involves ejecting material from a "target" that is a source onto a "substrate" such as a silicon wafer. Resputtering is re-emission of the deposited material during the deposition process by ion or atom bombardment. Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV (100,000 K).
Rigid bodyIn physics, a rigid body, also known as a rigid object, is a solid body in which deformation is zero or negligible. The distance between any two given points on a rigid body remains constant in time regardless of external forces or moments exerted on it. A rigid body is usually considered as a continuous distribution of mass. In the study of special relativity, a perfectly rigid body does not exist; and objects can only be assumed to be rigid if they are not moving near the speed of light.
PlatinumPlatinum is a chemical element with the symbol Pt and atomic number 78. It is a dense, malleable, ductile, highly unreactive, precious, silverish-white transition metal. Its name originates from Spanish platina, a diminutive of plata "silver". Platinum is a member of the platinum group of elements and group 10 of the periodic table of elements. It has six naturally occurring isotopes. It is one of the rarer elements in Earth's crust, with an average abundance of approximately 5 μg/kg.
Surface scienceSurface science is the study of physical and chemical phenomena that occur at the interface of two phases, including solid–liquid interfaces, solid–gas interfaces, solid–vacuum interfaces, and liquid–gas interfaces. It includes the fields of surface chemistry and surface physics. Some related practical applications are classed as surface engineering. The science encompasses concepts such as heterogeneous catalysis, semiconductor device fabrication, fuel cells, self-assembled monolayers, and adhesives.
PhotolithographyIn integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Typically, ultraviolet light is used to transfer a geometric design from an optical mask to a light-sensitive chemical (photoresist) coated on the substrate.
Compression moldingCompression molding is a method of molding in which the molding material, generally preheated, is first placed in an open, heated mold cavity. The mold is closed with a top force or plug member, pressure is applied to force the material into contact with all mold areas, while heat and pressure are maintained until the molding material has cured; this process is known as compression molding method and in case of rubber it is also known as 'Vulcanisation'.
OsmiridiumOsmiridium and iridosmine are natural alloys of the elements osmium and iridium, with traces of other platinum-group metals. Osmiridium has been defined as containing a higher proportion of iridium, with iridosmine containing more osmium. However, as the content of the natural Os-Ir alloys varies considerably, the constituent percentages of specimens often reflects the reverse situation of osmiridium describing specimens containing a higher proportion of osmium and iridosmine specimens containing more iridium.
Investment castingInvestment casting is an industrial process based on lost-wax casting, one of the oldest known metal-forming techniques. The term "lost-wax casting" can also refer to modern investment casting processes. Investment casting has been used in various forms for the last 5,000 years. In its earliest forms, beeswax was used to form patterns necessary for the casting process. Today, more advanced waxes, refractory materials and specialist alloys are typically used for making patterns.
Induction heatingInduction heating is the process of heating electrically conductive materials, namely metals or semi-conductors, by electromagnetic induction, through heat transfer passing through an inductor that creates an electromagnetic field within the coil to heat up and possibly melt steel, copper, brass, graphite, gold, silver, aluminum, or carbide. An important feature of the induction heating process is that the heat is generated inside the object itself, instead of by an external heat source via heat conduction.
Rigid body dynamicsIn the physical science of dynamics, rigid-body dynamics studies the movement of systems of interconnected bodies under the action of external forces. The assumption that the bodies are rigid (i.e. they do not deform under the action of applied forces) simplifies analysis, by reducing the parameters that describe the configuration of the system to the translation and rotation of reference frames attached to each body. This excludes bodies that display fluid, highly elastic, and plastic behavior.
