Publication

Resist-assisted assembly of single-walled carbon nanotube devices with nanoscale precision

Mihai Adrian Ionescu
2011
Journal Articles

Abstract

We report a novel resist-assisted dielectrophoresis method for single-walled carbon nanotube (SWCNT) assembly. It provides nanoscale control of the location, density, orientation and shape of individual SWCNTs. Sub-50 nm accuracy and a yield higher than 85% have been achieved. Using the method, we demonstrate suspended-body SWCNT field-effect transistors (FETs) with back-gate and sub-100 nm air-gap lateral-gate configurations. The suspended-body SWCNT FETs show excellent electrical characteristics with I-on/I-off similar to 10(7), ultra-low off currents similar to 10(-14) A and small subthreshold swings. The technique contributes to the ultimate solution for bottom-up fabrication of a broad field of CNT-based devices, such as: complementary metal-oxide-semiconductor and nano-electrical-mechanical-system devices for sensing and radio-frequency applications. Moreover, the versatile method could be applied to the assembly of many other promising materials, such as: nanowires and graphene flakes. (C) 2011 Elsevier Ltd. All rights reserved.

Official source

https://infoscience.epfl.ch/entities/publication/92041661-0e5b-42b7-b865-462066201151

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Mihai Adrian Ionescu
2011
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/92041661-0e5b-42b7-b865-462066201151

About this result

Related concepts (18)

Potential applications of carbon nanotubes

Carbon nanotubes (CNTs) are cylinders of one or more layers of graphene (lattice). Diameters of single-walled carbon nanotubes (SWNTs) and multi-walled carbon nanotubes (MWNTs) are typically 0.8 to 2 nm and 5 to 20 nm, respectively, although MWNT diameters can exceed 100 nm. CNT lengths range from less than 100 nm to 0.5 m. Individual CNT walls can be metallic or semiconducting depending on the orientation of the lattice with respect to the tube axis, which is called chirality.

Carbon nanotube

A carbon nanotube (CNT) is a tube made of carbon with a diameter in the nanometer range (nanoscale). They are one of the allotropes of carbon. Single-walled carbon nanotubes (SWCNTs) have diameters around 0.5–2.0 nanometers, about 100,000 times smaller than the width of a human hair. They can be idealized as cutouts from a two-dimensional graphene sheet rolled up to form a hollow cylinder. Multi-walled carbon nanotubes (MWCNTs) consist of nested single-wall carbon nanotubes in a nested, tube-in-tube structure.

Nanoelectromechanical systems

Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.

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Resist-assisted assembly of single-walled carbon nanotube devices with nanoscale precision

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