Publication

Meso-scale ceramic hotplates - A playground for high temperature microsystems

Paul Muralt, Bo Jiang
2015
Journal Articles

Abstract

This paper presents a mesa-scale low-temperature co-fired ceramic (LTCC) hotplate system. Using embedded thick-film platinum heaters, the hotplate has been able to operate at about 600 degrees C in a reliable manner, while its operating temperature can be regulated using an automation setup. The capability of structuring in LTCC materials made it possible to create an efficient thermal decoupling to have two temperature zones in the device, an active heating area and a cold-zone (

Official source

https://infoscience.epfl.ch/entities/publication/8edc8d13-9637-4f7f-864f-0a4d27395af1

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Meso-scale ceramic hotplates - A playground for high temperature microsystems

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