Publication

Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processes

Montserrat Fernandez-Bolanos Badia, Andrei Müller
2018
Conference Papers

Abstract

A few application demonstrators of heterogeneous 3D integrated systems including innovative nanosensors for gas detection and biofludic applications have been successfully implemented showing efficient low-temperature heterogeneous integration processes, miniaturization, low power consumption, extremely low detection limits (5 ppm) and novel functionalities very interesting for smart sensors in automotive and healthcare applications.

Official source

https://infoscience.epfl.ch/entities/publication/8c141611-f326-4e09-a06d-c17898354a51

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Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processes

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