Publication

Characterization of piezoelectric material for micro thermal harvesters

Related publications (28)

Quasi-Rayleigh model for modeling hysteresis of piezoelectric actuators

Piezoelectric actuators (PEAs) have been widely used in nano-positioning applications for their high resolution of displacement. However, hysteresis, which is an inherent property of ferroelectric PEAs has been shown to significantly degrade the system per ...

2020

Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators

Luis Guillermo Villanueva Torrijo, Andrea Lozzi, Marco Liffredo

In this paper we investigate the direct effect of resonator quality factor (Q) on the oscillator phase noise. We use 2-port contour mode resonators (CMRs), fabricated both with aluminum nitride (AlN) and aluminum scandium nitride (AlScN), as the frequency- ...

Institute of Electrical and Electronics Engineers2020

Actuation of piezoelectric structures with ferroelectric thin films having multiple elements

Paul Muralt

A method for driving piezoelectric elements of a micro-system. The piezoelectric elements comprising a ferroelectric thin film, and being configured to be part of any one or a combination of items of a list comprising: a cantilever, a bridge, a diaphragm, ...

2020

Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity

Kaitlin Marie Howell

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Growth, Integration, and Functional Characterization of AlScN Thin Films for RF MEMS Devices

Mohammad Fazel Parsapour Kolour

Mobile communication has grown explosively in recent years, leading to a strong demand for cheap, but high-performing bandpass filters with low insertion loss and smaller size. Surface acoustic wave (SAW) and thin film bulk acoustic wave (BAW) resonators r ...

EPFL2019

Density control of GaN quantum dots on AlN single crystal

Nicolas Grandjean, Sebastian Pascal Tamariz Kaufmann, Gordon Jens Callsen

Full control over the density and emission properties of GaN quantum dots (QDs) should be feasible, provided that the growth proceeds in the Stranski-Krastanov (SK) growth mode. In this work, we derive the phase diagram for GaN QD formation on AlN by NH3-m ...

2019

Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

Paul Muralt, Thomas La Grange, Silviu Cosmin Sandu, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko, Kaoru Yamashita

Accurate property determination of the piezoelectric thin film material Al(1-x)Sc(x)N is necessary for designing the next generation of radio frequency resonators in mobile communication, and for testing results of ab initio calculations. Sound velocity an ...

WILEY2019

AlN and AlScN contour mode resonators for MEMS-based RF front ends

Andrea Lozzi

Miniaturization is a simple yet very powerful concept. Applied to devices, it opens to plethora of new applications. Microelectromechanical systems (MEMS) are the result of scaling down the dimensions of devices to the micron range or the nano range (NEMS) ...

EPFL2019