Physical vapor depositionPhysical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a vapor phase and then back to a thin film condensed phase. The most common PVD processes are sputtering and evaporation.
Chemical vapor depositionChemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.
Plasma-enhanced chemical vapor depositionPlasma-enhanced chemical vapor deposition (PECVD) is a chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creation of a plasma of the reacting gases. The plasma is generally created by radio frequency (RF) (alternating current (AC)) frequency or direct current (DC) discharge between two electrodes, the space between which is filled with the reacting gases.
Sputter depositionSputter deposition is a physical vapor deposition (PVD) method of thin film deposition by the phenomenon of sputtering. This involves ejecting material from a "target" that is a source onto a "substrate" such as a silicon wafer. Resputtering is re-emission of the deposited material during the deposition process by ion or atom bombardment. Sputtered atoms ejected from the target have a wide energy distribution, typically up to tens of eV (100,000 K).
Pulsed laser depositionPulsed laser deposition (PLD) is a physical vapor deposition (PVD) technique where a high-power pulsed laser beam is focused inside a vacuum chamber to strike a target of the material that is to be deposited. This material is vaporized from the target (in a plasma plume) which deposits it as a thin film on a substrate (such as a silicon wafer facing the target). This process can occur in ultra high vacuum or in the presence of a background gas, such as oxygen which is commonly used when depositing oxides to fully oxygenate the deposited films.
TokamakA tokamak (ˈtoʊkəmæk; токамáк) is a device which uses a powerful magnetic field to confine plasma in the shape of a torus. The tokamak is one of several types of magnetic confinement devices being developed to produce controlled thermonuclear fusion power. , it was the leading candidate for a practical fusion reactor. Tokamaks were initially conceptualized in the 1950s by Soviet physicists Igor Tamm and Andrei Sakharov, inspired by a letter by Oleg Lavrentiev. The first working tokamak was attributed to the work of Natan Yavlinsky on the T-1 in 1958.
Scheme (mathematics)In mathematics, a scheme is a mathematical structure that enlarges the notion of algebraic variety in several ways, such as taking account of multiplicities (the equations x = 0 and x2 = 0 define the same algebraic variety but different schemes) and allowing "varieties" defined over any commutative ring (for example, Fermat curves are defined over the integers). Scheme theory was introduced by Alexander Grothendieck in 1960 in his treatise "Éléments de géométrie algébrique"; one of its aims was developing the formalism needed to solve deep problems of algebraic geometry, such as the Weil conjectures (the last of which was proved by Pierre Deligne).
Electron-beam physical vapor depositionElectron-beam physical vapor deposition, or EBPVD, is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.
Formal schemeIn mathematics, specifically in algebraic geometry, a formal scheme is a type of space which includes data about its surroundings. Unlike an ordinary scheme, a formal scheme includes infinitesimal data that, in effect, points in a direction off of the scheme. For this reason, formal schemes frequently appear in topics such as deformation theory. But the concept is also used to prove a theorem such as the theorem on formal functions, which is used to deduce theorems of interest for usual schemes.
Edge-localized modeAn edge-localized mode (ELM) is a plasma instability occurring in the edge region of a tokamak plasma due to periodic relaxations of the edge transport barrier in high-confinement mode. Each ELM burst is associated with expulsion of particles and energy from the confined plasma into the scrape-off layer. This phenomenon was first observed in the ASDEX tokamak in 1981. Diamagnetic effects in the model equations expand the size of the parameter space in which solutions of repeated sawteeth can be recovered compared to a resistive MHD model.
Fiber product of schemesIn mathematics, specifically in algebraic geometry, the fiber product of schemes is a fundamental construction. It has many interpretations and special cases. For example, the fiber product describes how an algebraic variety over one field determines a variety over a bigger field, or the pullback of a family of varieties, or a fiber of a family of varieties. Base change is a closely related notion. The of schemes is a broad setting for algebraic geometry.
Normal schemeIn algebraic geometry, an algebraic variety or scheme X is normal if it is normal at every point, meaning that the local ring at the point is an integrally closed domain. An affine variety X (understood to be irreducible) is normal if and only if the ring O(X) of regular functions on X is an integrally closed domain. A variety X over a field is normal if and only if every finite birational morphism from any variety Y to X is an isomorphism. Normal varieties were introduced by .
Real-time operating systemA real-time operating system (RTOS) is an operating system (OS) for real-time computing applications that processes data and events that have critically defined time constraints. An RTOS is distinct from a time-sharing operating system, such as Unix, which manages the sharing of system resources with a scheduler, data buffers, or fixed task prioritization in a multitasking or multiprogramming environment. Processing time requirements need to be fully understood and bound rather than just kept as a minimum.
Real-time computingReal-time computing (RTC) is the computer science term for hardware and software systems subject to a "real-time constraint", for example from event to system response. Real-time programs must guarantee response within specified time constraints, often referred to as "deadlines". Real-time responses are often understood to be in the order of milliseconds, and sometimes microseconds. A system not specified as operating in real time cannot usually guarantee a response within any timeframe, although typical or expected response times may be given.
Magnetic confinement fusionMagnetic confinement fusion is an approach to generate thermonuclear fusion power that uses magnetic fields to confine fusion fuel in the form of a plasma. Magnetic confinement is one of two major branches of fusion energy research, along with inertial confinement fusion. The magnetic approach began in the 1940s and absorbed the majority of subsequent development. Fusion reactions combine light atomic nuclei such as hydrogen to form heavier ones such as helium, producing energy.
Neutral-beam injectionNeutral-beam injection (NBI) is one method used to heat plasma inside a fusion device consisting in a beam of high-energy neutral particles that can enter the magnetic confinement field. When these neutral particles are ionized by collision with the plasma particles, they are kept in the plasma by the confining magnetic field and can transfer most of their energy by further collisions with the plasma. By tangential injection in the torus, neutral beams also provide momentum to the plasma and current drive, one essential feature for long pulses of burning plasmas.
Plasma-facing materialIn nuclear fusion power research, the plasma-facing material (or materials) (PFM) is any material used to construct the plasma-facing components (PFC), those components exposed to the plasma within which nuclear fusion occurs, and particularly the material used for the lining the first wall or divertor region of the reactor vessel. Plasma-facing materials for fusion reactor designs must support the overall steps for energy generation, these include: Generating heat through fusion, Capturing heat in the first wall, Transferring heat at a faster rate than capturing heat.
Operating systemAn operating system (OS) is system software that manages computer hardware and software resources, and provides common services for computer programs. Time-sharing operating systems schedule tasks for efficient use of the system and may also include accounting software for cost allocation of processor time, mass storage, peripherals, and other resources.
