Publication

Low-power hermetically sealed on-chip plasma light source micromachined in glass

Herbert Shea
2008
Conference Papers

Abstract

We report on the fabrication and testing of a chip-scale plasma light source. The device consists of a stack of three anodically bonded Pyrex wafers, which hermetically enclose a gas-filled cavity in which electrodes are used to ignite a low power (≪500 mW) RF plasma.

Official source

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Low-power hermetically sealed on-chip plasma light source micromachined in glass

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