Publication

Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform

Niels Quack, Alain Yuji Takabayashi, Hamed Sattari
2021
Conference Papers

Abstract

MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2 pi phase shifter with a 1.54 mu s time constant and 0.5 dB insertion loss in IMEC's iSiPP5OG platform.

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Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform

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