Publication

Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator

Paul Muralt, Vladimir Pashchenko, Fazel Parsapour
2018
Conference Papers

Abstract

Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(33) and c(44) from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.

Official source

https://infoscience.epfl.ch/entities/publication/8477cb64-0345-482f-b3c3-ebf3f4bbb4c0

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Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator

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