Publication

Batch Fabrication of Multilayer Polymer Cantilevers with Integrated Hard Tips for High-Speed Atomic Force Microscopy

2019
Conference Papers

Abstract

Increasing the speed of AFM imaging has significant benefits for academic research as well as industrial applications. In many imaging modes, the dynamic response of the cantilever probe dictates the achievable speed. Polymer cantilevers have gained great attention due to their high tracking ability and ease of fabrication. However, polymer cantilevers also have drawbacks. Polymers are not well suitable materials for the tip of the probe due to their high wear rate. This has limited the broader use of polymer cantilevers for AFM imaging. In this work, we combine the advantages of polymer cantilevers with the advantages of cantilevers made of conventional MEMS materials. We demonstrate the batch integration of a hard tip into a polymer-core multilayer cantilever probe, thereby merging speed, high-resolution and durability in a single cantilever.

Official source

https://infoscience.epfl.ch/entities/publication/845008fc-2c12-41dd-994f-f53ed23b8d5e

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2019
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/845008fc-2c12-41dd-994f-f53ed23b8d5e

About this result

Related concepts (29)

Atomic force microscopy

Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. Atomic force microscopy (AFM) is a type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit.

Transmission electron microscopy

Transmission electron microscopy (TEM) is a microscopy technique in which a beam of electrons is transmitted through a specimen to form an image. The specimen is most often an ultrathin section less than 100 nm thick or a suspension on a grid. An image is formed from the interaction of the electrons with the sample as the beam is transmitted through the specimen. The image is then magnified and focused onto an imaging device, such as a fluorescent screen, a layer of photographic film, or a sensor such as a scintillator attached to a charge-coupled device.

Cantilever

A cantilever is a rigid structural element that extends horizontally and is supported at only one end. Typically it extends from a flat vertical surface such as a wall, to which it must be firmly attached. Like other structural elements, a cantilever can be formed as a beam, plate, truss, or slab. When subjected to a structural load at its far, unsupported end, the cantilever carries the load to the support where it applies a shear stress and a bending moment. Cantilever construction allows overhanging structures without additional support.

Related publications (1)

Batch Fabrication of Multilayer Polymer Cantilevers with Integrated Hard Tips for High-Speed Atomic Force Microscopy

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Microlever with combined integrated sensor/actuator functions for scanning force microscopy