Publication

CMOS compatible fully integrated Mach-Zehnder interferometer in SOI technology

Mihai Adrian Ionescu, Philippe Renaud, Philippe Flückiger
2000
Journal Articles

Abstract

We present a fully integrated Mach-Zehnder interferometer in silicon-on- insulator technology. Modulation of the index of refraction is achieved through the plasma dispersion effect resulting in a bandwidth in the 10 MHz range. A particular and innovative design makes this device completely compatible with CMOS technology allowing electronic functions to be integrated on the same substrate. Measurement results, limitations due to thermooptic effect and absorption related to charge injection together with further improvements are discussed.

Official source

https://infoscience.epfl.ch/entities/publication/835041c1-2640-4398-83b0-71718bd59893

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Mihai Adrian Ionescu, Philippe Renaud, Philippe Flückiger
2000
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/835041c1-2640-4398-83b0-71718bd59893

About this result

Related concepts (32)

Integrated circuit

An integrated circuit or monolithic integrated circuit (also referred to as an IC, a chip, or a microchip) is a set of electronic circuits on one small flat piece (or "chip") of semiconductor material, usually silicon. Large numbers of miniaturized transistors and other electronic components are integrated together on the chip. This results in circuits that are orders of magnitude smaller, faster, and less expensive than those constructed of discrete components, allowing a large transistor count.

Silicon on sapphire

Silicon on sapphire (SOS) is a hetero-epitaxial process for metal–oxide–semiconductor (MOS) integrated circuit (IC) manufacturing that consists of a thin layer (typically thinner than 0.6 μm) of silicon grown on a sapphire (Al2O3) wafer. SOS is part of the silicon-on-insulator (SOI) family of CMOS (complementary MOS) technologies. Typically, high-purity artificially grown sapphire crystals are used. The silicon is usually deposited by the decomposition of silane gas (SiH4) on heated sapphire substrates.

CMOS

Complementary metal–oxide–semiconductor (CMOS, pronounced "sea-moss", siːmɑːs, -ɒs) is a type of metal–oxide–semiconductor field-effect transistor (MOSFET) fabrication process that uses complementary and symmetrical pairs of p-type and n-type MOSFETs for logic functions. CMOS technology is used for constructing integrated circuit (IC) chips, including microprocessors, microcontrollers, memory chips (including CMOS BIOS), and other digital logic circuits.

Related publications (2)

CMOS compatible fully integrated Mach-Zehnder interferometer in SOI technology

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Experimental Kohonen Neural Network Implemented in CMOS 0.18μm Technology

Intensity modulation in two Mach-Zehnder interferometers using plasma dispersion in silicon-on-insulator