Publication

Ion beam sputtering and properties of YBaCuO superconducting thin films

Helmuth Berger, Davor Pavuna
1988
Journal Articles

Abstract

The authors have produced YBaCuO thin films by mono-target ion beam sputtering. Post annealing in O2 at 850°C results in superconducting films on (100) SrTiO3 with R=0 at ~60 K. Preliminary results of chemical analysis of the films by X-ray photoelectron spectroscopy (XPS), as well as combined secondary ion mass (SIMS) and Auger electron spectroscopy (AES) indicate formation of hydroxides and carbonates in the surface of samples and somewhat lower concentration of oxygen than the optimal value of 6.9

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https://infoscience.epfl.ch/entities/publication/7ded24c7-9eef-4340-b304-796d3c22809b

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Helmuth Berger, Davor Pavuna
1988
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/7ded24c7-9eef-4340-b304-796d3c22809b

About this result

Related concepts (21)

X-ray photoelectron spectroscopy

X-ray photoelectron spectroscopy (XPS) is a surface-sensitive quantitative spectroscopic technique based on the photoelectric effect that can identify the elements that exist within a material (elemental composition) or are covering its surface, as well as their chemical state, and the overall electronic structure and density of the electronic states in the material. XPS is a powerful measurement technique because it not only shows what elements are present, but also what other elements they are bonded to.

Secondary ion mass spectrometry

Secondary-ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions. The mass/charge ratios of these secondary ions are measured with a mass spectrometer to determine the elemental, isotopic, or molecular composition of the surface to a depth of 1 to 2 nm.

Auger electron spectroscopy

Auger electron spectroscopy (AES; pronounced oʒe in French) is a common analytical technique used specifically in the study of surfaces and, more generally, in the area of materials science. It is a form of electron spectroscopy that relies on the Auger effect, based on the analysis of energetic electrons emitted from an excited atom after a series of internal relaxation events. The Auger effect was discovered independently by both Lise Meitner and Pierre Auger in the 1920s.

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Ion beam sputtering and properties of YBaCuO superconducting thin films

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