Active vibration controlActive vibration control is the active application of force in an equal and opposite fashion to the forces imposed by external vibration. With this application, a precision industrial process can be maintained on a platform essentially vibration-free. Many precision industrial processes cannot take place if the machinery is being affected by vibration. For example, the production of semiconductor wafers requires that the machines used for the photolithography steps be used in an essentially vibration-free environment or the sub-micrometre features will be blurred.
