Publication

LTCC ultra high isostatic pressure sensors

Thomas Maeder, Peter Ryser, Niklaus Johner
2007
Conference Papers

Abstract

Piezoresistive pressure sensors using classical deformable structures such as membranes progressively run into difficulties at very high pressures (above 1 to 2 kbar), due to the decreasing ratio between the available sensing strain on the outer membrane surface and the maximal materials strain experienced on the pressurised side. Therefore, a novel "isostatic" pressure sensor concept, whereby the sensing element is immersed in the pressure fluid, has been developed. This method in principle allows the measurement of very high pressures, because materials stresses within the sensing beam are all compressive. LTCC (Low-Temperature Cofired Ceramic) beams with hermetically embedded thick-film piezoresistor bridges have been fabricated, packaged and characterised as sensor elements. The observed sensitivity is comparable to the response expected from the LTCC and piezoresistor materials properties. Key words: piezoresistivity, thick-film, LTCC, high pressure sensor.

Official source

https://infoscience.epfl.ch/entities/publication/7beff8a5-93c9-43e6-8b44-946ce16325ab

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Thomas Maeder, Peter Ryser, Niklaus Johner
2007
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/7beff8a5-93c9-43e6-8b44-946ce16325ab

About this result

Related concepts (32)

Pressure measurement

Pressure measurement is the measurement of an applied force by a fluid (liquid or gas) on a surface. Pressure is typically measured in units of force per unit of surface area. Many techniques have been developed for the measurement of pressure and vacuum. Instruments used to measure and display pressure mechanically are called pressure gauges, vacuum gauges or compound gauges (vacuum & pressure). The widely used Bourdon gauge is a mechanical device, which both measures and indicates and is probably the best known type of gauge.

Pressure

Pressure (symbol: p or P) is the force applied perpendicular to the surface of an object per unit area over which that force is distributed. Gauge pressure (also spelled gage pressure) is the pressure relative to the ambient pressure. Various units are used to express pressure. Some of these derive from a unit of force divided by a unit of area; the SI unit of pressure, the pascal (Pa), for example, is one newton per square metre (N/m2); similarly, the pound-force per square inch (psi, symbol lbf/in2) is the traditional unit of pressure in the imperial and US customary systems.

Stress–strain analysis

Stress–strain analysis (or stress analysis) is an engineering discipline that uses many methods to determine the stresses and strains in materials and structures subjected to forces. In continuum mechanics, stress is a physical quantity that expresses the internal forces that neighboring particles of a continuous material exert on each other, while strain is the measure of the deformation of the material. In simple terms we can define stress as the force of resistance per unit area, offered by a body against deformation.

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LTCC ultra high isostatic pressure sensors

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