Publication

Frequency stability of PZE actuated suspended micro-channel resonators

2017
Talks

Abstract

Nanoelectromechanical (NEMS) resonators have shown outstanding performance in mass sensing and heavy filtering applications due to their exceptional sensitivities and high quality factors. Examples of applications range from biomolecules/gas detection to extremely selective filters in RF circuits. In this seminar the principle of operation and microfabrication of resonant NEMS will be discussed, with particular attention to piezoelectrically actuated resonators. We will address the problem of electronic detection in these devices, becoming more challenging with downscaling since stray reactances start to impair the signal analysis; the effect of such parasitics is a coherent background appearing in the readout. Strategies for background cancellation will be evaluated in this presentation.

Official source

https://infoscience.epfl.ch/entities/publication/79c090f5-1ad8-4f1c-847a-5d64387c3f24

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2017
Talks

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/79c090f5-1ad8-4f1c-847a-5d64387c3f24

About this result

Related concepts (32)

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A thin-film bulk acoustic resonator (FBAR or TFBAR) is a device consisting of a piezoelectric material manufactured by thin film methods between two conductive – typically metallic – electrodes and acoustically isolated from the surrounding medium. The operation is based on the piezoelectricity of the piezolayer between the electrodes. FBAR devices using piezoelectric films with thicknesses ranging from several micrometres down to tenths of micrometres resonate in the frequency range of 100 MHz to 20 GHz.

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Frequency stability of PZE actuated suspended micro-channel resonators

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