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A 9.4MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The tuning fork VB-FET used in this work provides a high quality factor of 9400 in the open-loop configuration and a low equivalent resistance. This performance makes the VB-FET an interesting candidate for fully integrated oscillator. An oscillator based on the tuning fork VB-FET is characterized.
Mihai Adrian Ionescu, Fabio Bersano, Niccolò Martinolli, Michele Ghini, Eloi Régis L Collette
Tobias Kippenberg, Guanhao Huang, Nils Johan Engelsen, Alberto Beccari