Publication

Quantitative Comparison of Piezoresistive Sensitivity for Various Biosensor Design

Nico de Rooij
2011
Conference Papers

Abstract

Piezoresistive cantilevers have been extensively used for many years as force sensors, mass detectors, image scanning tools, and as biosensors, which have absorbate layers generating surface stress upon reaction with analyte. We will introduce different piezoresistive biosensor designs, e.g., single clamped cantilever and membrane-type sensor. The different sensor structures are compared with respect to DR/R value of a single piezoresistor embedded on the device structures with different arrangements. The quantitative DR/R values of each sensor were calculated with a simulation tool based on finite element analysis, to be introduced as another contribution to this conference. Based on the results, we will present an optimized single clamped cantilever with one piezoresistor and an optimized biosensor structure, which is not a simple “cantilever” rather it consists of an “absorbate membrane” suspended by four “sensing beams”.

Official source

https://infoscience.epfl.ch/entities/publication/75b34103-6c9a-4e02-ad2d-d2673a2c756e

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Nico de Rooij
2011
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/75b34103-6c9a-4e02-ad2d-d2673a2c756e

About this result

Related concepts (25)

Nanoelectromechanical systems

Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.

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A sensor is a device that produces an output signal for the purpose of sensing a physical phenomenon. In the broadest definition, a sensor is a device, module, machine, or subsystem that detects events or changes in its environment and sends the information to other electronics, frequently a computer processor. Sensors are used in everyday objects such as touch-sensitive elevator buttons (tactile sensor) and lamps which dim or brighten by touching the base, and in innumerable applications of which most people are never aware.

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