Publication

Scalable-manufactured of Lithium-Tantalate-on-Insulator (LTOI) Mach-Zehnder Modulators

2025

Abstract

We demonstrate the first high-speed lithium-tantalate-on-insulator (LTOI) Mach-Zehnder modulator (MZM) manufactured by highly scalable UV wafer-stepper lithography. 75 GHz 3-dB bandwidth electro-optical response and 528 Gbit/s line rates of PAM8 signaling is achieved.

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