Publication

Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

Tobias Kippenberg, Junqiu Liu, Maxim Karpov, Rui Ning Wang, Jijun He, Guanhao Huang
2020
Conference Papers

Abstract

Recent advances in silicon nitride integrated photonics have achieved ultralow optical losses. Transferring this technology to standard commercial foundries, and merging it with silicon photonics via heterogeneous integration, will seed novel laser and quantum applications. (C) 2020 The Author(s)

Official source

https://infoscience.epfl.ch/entities/publication/6f45f4bf-0807-48dd-8ccb-7517559cfdf1

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Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

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