Publication

Fabrication of a novel microsystem for the electrical characterisation of cell array

Martinus Adela Maria Gijs, Abdeljalil Sayah, Serge Hediger
1999
Journal Articles

Abstract

We have designed and realised a new type of microsystem for the electrical characterisation of arrays of living cells for biomedical diagnostic purposes. We have used deep plasma etching for the fabrication of microholes and micro-fluidic channels in silicon substrates. After oxidation and electrical contact fabrication, these structured silicon wafers have been anodically bonded with Pyrex wafers. The fabrication is completed by the gluing of micro-patterned polyimide foils on top of the silicon. We have tested the electrical characteristics of our microsystems using NaCl salt solutions of various molarities. We believe that our device will open new perspectives for biochemical sensor applications.

Official source

https://infoscience.epfl.ch/entities/publication/6e1d1ae2-fe59-4c84-bfd2-8ccf609a8622

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Martinus Adela Maria Gijs, Abdeljalil Sayah, Serge Hediger
1999
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/6e1d1ae2-fe59-4c84-bfd2-8ccf609a8622

About this result

Related concepts (32)

Monocrystalline silicon

Monocrystalline silicon, more often called single-crystal silicon, in short mono c-Si or mono-Si, is the base material for silicon-based discrete components and integrated circuits used in virtually all modern electronic equipment. Mono-Si also serves as a photovoltaic, light-absorbing material in the manufacture of solar cells. It consists of silicon in which the crystal lattice of the entire solid is continuous, unbroken to its edges, and free of any grain boundaries (i.e. a single crystal).

Crystalline silicon

Crystalline silicon or (c-Si) Is the crystalline forms of silicon, either polycrystalline silicon (poly-Si, consisting of small crystals), or monocrystalline silicon (mono-Si, a continuous crystal). Crystalline silicon is the dominant semiconducting material used in photovoltaic technology for the production of solar cells. These cells are assembled into solar panels as part of a photovoltaic system to generate solar power from sunlight. In electronics, crystalline silicon is typically the monocrystalline form of silicon, and is used for producing microchips.

Polycrystalline silicon

Polycrystalline silicon, or multicrystalline silicon, also called polysilicon, poly-Si, or mc-Si, is a high purity, polycrystalline form of silicon, used as a raw material by the solar photovoltaic and electronics industry. Polysilicon is produced from metallurgical grade silicon by a chemical purification process, called the Siemens process. This process involves distillation of volatile silicon compounds, and their decomposition into silicon at high temperatures. An emerging, alternative process of refinement uses a fluidized bed reactor.

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Fabrication of a novel microsystem for the electrical characterisation of cell array

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