Publication

Accurate masking technology for high-resolution powder blasting

Martinus Adela Maria Gijs, Abdeljalil Sayah, Anne-Gabrielle Pawlowski
2005
Journal Articles

Abstract

We have combined eroding 10 µm diameter Al2O3 particles with a new masking technology to realize the smallest and most accurate possible structures by powder blasting. Our masking technology is based on the sequential combination of two polymers:(i) the brittle epoxy resin SU8 for its photosensitivity and (ii) the elastic and thermocurable poly-dimethylsiloxane for its large erosion resistance. We have micropatterned various types of structures with a minimum width of 20 µm for test structures with an aspect ratio of 1, and 50 µm for test structures with an aspect ratio of 2.

Official source

https://infoscience.epfl.ch/entities/publication/6a0c086f-a06f-40b2-bc30-fa88fe6762c2

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