Publication

Electrical properties and microstructural evolution of porous Pb1-xCaxTiO3 pyroelectric thin films

Nava Setter, Paul Muralt, Andreas Seifert
1999
Journal Articles

Abstract

The properties of Pb1-xCaxTiO3 (x=0-30) thin films for applications in point-detectors and arrays can be further improved ii porous, low-dielectric constant layers are being Used. Both 2-methoxyethanol and 1,3-propanediol based solution precursors were used for spin-coating platinized Si3N4/SiO2/Si wafers. The heating-rate during the final anneal was observed to be the controlling parameter for the evolution of either dense or porous microstructures, Low temperature crystallization of the perovskite phase (T

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https://infoscience.epfl.ch/entities/publication/6a0ab175-bd31-4283-a83f-4ac128f13b3e

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Nava Setter, Paul Muralt, Andreas Seifert
1999
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/6a0ab175-bd31-4283-a83f-4ac128f13b3e

About this result

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Electrical properties and microstructural evolution of porous Pb1-xCaxTiO3 pyroelectric thin films

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