Publication

Ferroelectric thin films for microsystems

Paul Muralt, Thomas Maeder
1995
Conference Papers

Abstract

Deposition, integration and application issues of ferroelectric thin films are briefly reviewed. Applications in ultrasonic micromotors and infra-red sensors are treated in more detail. Current results on stress measurements across the ferroelectric phase transition and on pyroelectric devices are presented.

Official source

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Ferroelectric thin films for microsystems

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