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A method for operating a light microscope comprises emitting and guiding a plurality of illumination light beams towards a specimen (6) to form a plurality of separated illumination light spots (2A, 2B, 2C, 2D) at the specimen; and guiding detection light beams (11) coming from the illumination light spots (2A, 2B, 2C, 2D) to a detector (10) comprising a plurality of sensor arrays (31-34). Each sensor array (31-34) comprises photon-counting detector elements (40), and detection light beams (11) from different illumination light spots (2A, 2B, 2C, 2D) are guided to different sensor arrays (31-34). Measured signals from the sensor arrays (31-34) are analysed to determine positional information about the light spots (15) on the sensor arrays (31 -34). It is adjusted where the light spots (15) hit the sensor arrays (31-34) based on the positional information. A corresponding light microscope is furthermore disclosed.
Edoardo Charbon, Claudio Bruschini, Paul Mos, Yang Lin