Publication

Fragmented Membrane MEM Bulk Lateral Resonators with nano-gaps on 1.5 mu m SOI

Mihai Adrian Ionescu
2007
Conference Papers

Abstract

The design, fabrication and experimental investigation of 21MHz MEM Bulk Lateral Resonators (BLR) on 1.5 mu m Silicon-On-Insulator (SOI) Fragmented Membranes with 100nm air-gaps are reported(#). Quality factors as high as 33'000 are measured under vacuum at room temperature, with 20V DC bias and low AC-power. The influence of temperature on the resonance frequency and quality factor is studied and discussed from 80K and 380K. A very high quality factor of 182'000 and a motional resistance of 165k Omega, are reported at 80K. The paper shows that high-quality factor MEM resonator can be integrated on partially-depleted thin SOI, which demonstrates the possibility of making full-integrated hybrid MEM-CMOS integrated circuits for future communication applications.

Official source

https://infoscience.epfl.ch/entities/publication/684b6dc3-706e-458c-945f-bac199fbcf66

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Mihai Adrian Ionescu
2007
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/684b6dc3-706e-458c-945f-bac199fbcf66

About this result

Related concepts (32)

Q factor

In physics and engineering, the quality factor or Q factor is a dimensionless parameter that describes how underdamped an oscillator or resonator is. It is defined as the ratio of the initial energy stored in the resonator to the energy lost in one radian of the cycle of oscillation. Q factor is alternatively defined as the ratio of a resonator's centre frequency to its bandwidth when subject to an oscillating driving force. These two definitions give numerically similar, but not identical, results.

Quality (business)

In business, engineering, and manufacturing, quality – or high quality – has a pragmatic interpretation as the non-inferiority or superiority of something (goods or services); it is also defined as being suitable for the intended purpose (fitness for purpose) while satisfying customer expectations. Quality is a perceptual, conditional, and somewhat subjective attribute and may be understood differently by different people. Consumers may focus on the specification quality of a product/service, or how it compares to competitors in the marketplace.

Quality management

Quality management ensures that an organization, product or service consistently functions well. It has four main components: quality planning, quality assurance, quality control and quality improvement. Quality management is focused not only on product and service quality, but also on the means to achieve it. Quality management, therefore, uses quality assurance and control of processes as well as products to achieve more consistent quality. Quality control is also part of quality management.

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Fragmented Membrane MEM Bulk Lateral Resonators with nano-gaps on 1.5 mu m SOI

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