Publication

Enhanced performance of pyroelectric microsensors through the introduction of nanoporosity

Nava Setter
2004
Journal Articles

Abstract

Sol-gel process has successfully been applied for the deposition of porous PbZrxTi1-xO3 (x = 0.45, 0.15) thin films on platinized silicon wafers. Addition of a polymer as a volatile phase to the precursor sol prior to spin coating has been proved an excellent method to synthesize PZT-porous films. Introduction of pores creates a matrix void composite resulting in high figures of merit for pyroelectric applications. The dielectric constant was found to be strongly dependent to the porosity, whereas the pyrocoefficient changes moderately with porosity. The relative permittivity can be decreased down to 150 and 95 for PZT films with Zr/Ti ratio of 45/55 and 15/85 respectively, and the figures of merit F-v and F-d values for PZT (Zr/Ti= 15/85) films can be increased up to 1.95 and 139 muC/m(2) K, respectively by incorporating a nanoporous structure in films. (C) 2003 Elsevier Ltd. All rights reserved.

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https://infoscience.epfl.ch/entities/publication/67e54b72-ff0a-48b4-bffc-f7c00f766a90

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Nava Setter
2004
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/67e54b72-ff0a-48b4-bffc-f7c00f766a90

About this result

Related concepts (32)

Piezoelectricity

Piezoelectricity (ˌpiːzoʊ-,_ˌpiːtsoʊ-,_paɪˌiːzoʊ-, piˌeɪzoʊ-,_piˌeɪtsoʊ-) is the electric charge that accumulates in certain solid materials—such as crystals, certain ceramics, and biological matter such as bone, DNA, and various proteins—in response to applied mechanical stress. The word piezoelectricity means electricity resulting from pressure and latent heat. It is derived (an ancient source of electric current). The piezoelectric effect results from the linear electromechanical interaction between the mechanical and electrical states in crystalline materials with no inversion symmetry.

Relative permittivity

The relative permittivity (in older texts, dielectric constant) is the permittivity of a material expressed as a ratio with the electric permittivity of a vacuum. A dielectric is an insulating material, and the dielectric constant of an insulator measures the ability of the insulator to store electric energy in an electrical field. Permittivity is a material's property that affects the Coulomb force between two point charges in the material. Relative permittivity is the factor by which the electric field between the charges is decreased relative to vacuum.

Thin film

A thin film is a layer of material ranging from fractions of a nanometer (monolayer) to several micrometers in thickness. The controlled synthesis of materials as thin films (a process referred to as deposition) is a fundamental step in many applications. A familiar example is the household mirror, which typically has a thin metal coating on the back of a sheet of glass to form a reflective interface. The process of silvering was once commonly used to produce mirrors, while more recently the metal layer is deposited using techniques such as sputtering.

Related publications (32)

Enhanced performance of pyroelectric microsensors through the introduction of nanoporosity

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