Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

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Three kinds of ceramics, zirconia-toughened alumina (ZTA), alumina-toughened zirconia (ATZ) and yttria-stabilized zirconia (YSZ), were tested as anvil materials, mainly for the purpose of neutron scattering study under high pressure. ZTA with non-toroidal ...

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Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

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