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Waveguide device including a substrate, a cladding layer provided on the substrate, an elongated waveguide core enclosed by the cladding layer, at least one impurity gettering device configured to reduce transition metal impurity of the substrate transitioning to the waveguide core. the impurity gettering device comprises a plurality of impurity gettering elements located inside the cladding layer and the plurality of impurity gettering elements extend inside the cladding layer between the elongated waveguide core and the substrate or a portion thereof.