Publication

Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics

Luis Guillermo Villanueva Torrijo, Niels Quack, Marco Liffredo, Hernán Furci, Jasmin Spettel
2022
Conference Papers

Abstract

Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 mu m - 25 mu m, surface roughness characterization, waveguide and grating coupler designs at telecom wavelength. (C) 2022 The Author(s)

Official source

https://infoscience.epfl.ch/entities/publication/61d325d2-8626-473e-9feb-ed3511f769d1

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