Publication

In-Situ Thin Film Growth of PbTiO3 By Multi Target Sputtering

Paul Muralt
1994
Conference Papers

Abstract

The in-situ reactive sputter deposition of PbTiO3 on Pt/Ti/SiO2/Si from two metallic targets was investigated. A minimal lead oxide flux of two to three times the titanium oxide flux is needed in order to obtain stoichiometric films with the perovskite structure. For higher fluxes, the Pb/Ti ratio in the film stays at the stoichiometric value 1; the orientation changes from random to ; and the film morphology transforms from a rough to a smooth polycrystalline film. The obtained dielectric constants vary between 40 and 150, the losses between 2 and 4 % (10 kHz). The method could be extended to PbZrxTi1-xO3 for x ≤ 0.7. The orientation is lost when the Pt electrodes are replaced by RuO2 electrodes.

Official source

https://infoscience.epfl.ch/entities/publication/6156e063-285c-4a82-acec-2232e9892437

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Paul Muralt
1994
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/6156e063-285c-4a82-acec-2232e9892437

About this result

Related concepts (32)

Flux (metallurgy)

In metallurgy, a flux () is a chemical cleaning agent, flowing agent, or purifying agent. Fluxes may have more than one function at a time. They are used in both extractive metallurgy and metal joining. Some of the earliest known fluxes were sodium carbonate, potash, charcoal, coke, borax, lime, lead sulfide and certain minerals containing phosphorus. Iron ore was also used as a flux in the smelting of copper.

Zinc oxide

Zinc oxide is an inorganic compound with the formula ZnO. It is a white powder that is insoluble in water. ZnO is used as an additive in numerous materials and products including cosmetics, food supplements, rubbers, plastics, ceramics, glass, cement, lubricants, paints, sunscreens, ointments, adhesives, sealants, pigments, foods, batteries, ferrites, fire retardants, semi conductors, and first-aid tapes. Although it occurs naturally as the mineral zincite, most zinc oxide is produced synthetically.

Solder

Solder (UKˈsɒldə,_ˈsəʊldə; NA: ˈsɒdər) is a fusible metal alloy used to create a permanent bond between metal workpieces. Solder is melted in order to wet the parts of the joint, where it adheres to and connects the pieces after cooling. Metals or alloys suitable for use as solder should have a lower melting point than the pieces to be joined. The solder should also be resistant to oxidative and corrosive effects that would degrade the joint over time. Solder used in making electrical connections also needs to have favorable electrical characteristics.

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In-Situ Thin Film Growth of PbTiO3 By Multi Target Sputtering

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