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On-chip cell handling and analysis is given more and more interest, as new cytometry devices can be realised or efficiently combined and integrated. The developed sensor presents several improvements compared to other integrated flow cytometers. It is aimed at diagnostic applications for cell counting and separation in hematology and allows fast cell screening using simultaneous multi-frequency measurements. One major improvement is that the sensor sensitivity to the electrode properties is eliminated by a differential electrode measurement. Negative dielectrophoretic forces can be used to realize a subsequent cell-sorting device.