Coupling length of silicon-on-insulator directional couplers probed by Fourier-space imaging

We use a Fourier-space imaging technique relying on outcoupling grating probes to study the coupled mode interaction and dispersion properties of guided modes in silicon-on-insulator codirectional couplers. Our approach allows us to measure the mode splitting inherent to coupled systems, determine the mode symmetry, and locally probe the coupling length with an accuracy of +/- 50 nm. A systematic study of directional couplers with different waveguide widths, coupling gaps, and e-beam exposure doses is reported in order to verify the results across a wider parameter space. (C) 2008 American Institute of Physics.