Publication

Micromechanical testing of SU-8 cantilevers

Jürgen Brugger, Tobias Kramer
2005
Journal Articles

Abstract

SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.

Official source

https://infoscience.epfl.ch/entities/publication/5ae51c0c-39e6-4692-9bbe-8543d02de684

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Micromechanical testing of SU-8 cantilevers

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