Publication

Microfabrication and packaging of a Rubidium vapor cell as a plasma light source for MEMS atomic clocks

Nico de Rooij
2011
Conference Papers

Abstract

We report on the micro-fabrication and characterization of a chip-scale plasma light source based on a Rubidium (Rb) vapor cell. The Rb plasma light source is intended for use as an integrated optical pump-light source in miniature double-resonance Rb atomic clocks [1, 5]. The RF plasma is capacitively coupled using external electrodes, and the light source is impedance matched to the source for frequencies between 1 and 36 MHz. Rb vapor cells have been previously developed as reference cells for atomic clocks but not as light sources. This is the first reported Rb plasma emitted from a chip-scale device. Stable light emission is observed for over 18 days.

Official source

https://infoscience.epfl.ch/entities/publication/5076f137-c842-48ea-8a9f-9dd63cf3cad0

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Nico de Rooij
2011
Conference Papers

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/5076f137-c842-48ea-8a9f-9dd63cf3cad0

About this result

Related concepts (32)

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Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.

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Microfabrication and packaging of a Rubidium vapor cell as a plasma light source for MEMS atomic clocks

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