Publication

FABRICATION OF ULTRA SENSITIVE MONOCRYSTALLINE SILICON CANTILEVERS

Giovanni Boero
2006
Reports

Abstract

The goal of the project is to fabricate ultra sensitive cantilevers for magnetic resonance force microscopy. Such devices have been produced using SOI wafers and a novel fabrication process combining Al encapsulation and HF-vapor release. The realized cantilevers are 200, 350 or 500 µm long, 10 or 20 µm wide and 500 or 340 nm thick. The characterization shows promising results in vacuum at room temperature, e.g. a cantilever annealed at 800°C (L=500um, w=10um, t=0.5um) has a resonance frequency f = 2kHz, a spring constant k = 0.0004 N/m and a quality factor Q > 100000.

Official source

https://infoscience.epfl.ch/entities/publication/4abe07d2-2b24-43b8-8347-782140cfb9c7

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Giovanni Boero
2006
Reports

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/4abe07d2-2b24-43b8-8347-782140cfb9c7

About this result

Related concepts (30)

Semiconductor device fabrication

Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as NAND flash and DRAM) that are present in everyday electrical and electronic devices. It is a multiple-step photolithographic and physio-chemical process (with steps such as thermal oxidation, thin-film deposition, ion-implantation, etching) during which electronic circuits are gradually created on a wafer, typically made of pure single-crystal semiconducting material.

Quality control

Quality control (QC) is a process by which entities review the quality of all factors involved in production. ISO 9000 defines quality control as "a part of quality management focused on fulfilling quality requirements". This approach places emphasis on three aspects (enshrined in standards such as ISO 9001): Elements such as controls, job management, defined and well managed processes, performance and integrity criteria, and identification of records Competence, such as knowledge, skills, experience, and qualifications Soft elements, such as personnel, integrity, confidence, organizational culture, motivation, team spirit, and quality relationships.

Atomic force microscopy

Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. Atomic force microscopy (AFM) is a type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than the optical diffraction limit.

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FABRICATION OF ULTRA SENSITIVE MONOCRYSTALLINE SILICON CANTILEVERS

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