Publication

Two Dimensional Array of Nanomechanical Membrane-type Surface Stress Sensor (MSS) with Improved Sensitivity

Nico de Rooij
2012
Journal Articles

Abstract

We present a new generation of nanomechanical membrane-type surface stress sensor (MSS) chip, which has a two dimensional (2D) array of MSS on a single chip. The implementation of several techniques in design and microfabrication improves the sensitivity, achieving 3~4 times higher sensitivity than the first generation MSS chip and exceeding ~100 times sensitivity compared to a standard cantilever-type sensor. Since the integrated piezoresistive read-out can meet the practical requirements, such as small and simple without expensive peripheral devices, the MSS is one of the most promising transducers for nanomechanical sensing, providing various opportunities of practical applications in a wide range of fields, such as for the growing demands in medical, security, and environmental issues.

Official source

https://infoscience.epfl.ch/entities/publication/48a3aaea-7aaf-42d9-93d9-ef16c0095fa7

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Nico de Rooij
2012
Journal Articles

Abstract

Official source

https://infoscience.epfl.ch/entities/publication/48a3aaea-7aaf-42d9-93d9-ef16c0095fa7

About this result

Related concepts (24)

System on a chip

A system on a chip or system-on-chip (SoC ,ˈɛsoʊsiː; pl. SoCs ,ˈɛsoʊsiːz) is an integrated circuit that integrates most or all components of a computer or other electronic system. These components almost always include on-chip central processing unit (CPU), memory interfaces, input/output devices, input/output interfaces, and secondary storage interfaces, often alongside other components such as radio modems and a graphics processing unit (GPU) – all on a single substrate or microchip.

Motherboard

A motherboard (also called mainboard, main circuit board, MB, mboard, backplane board, base board, system board, mobo; or in Apple computers logic board) is the main printed circuit board (PCB) in general-purpose computers and other expandable systems. It holds and allows communication between many of the crucial electronic components of a system, such as the central processing unit (CPU) and memory, and provides connectors for other peripherals.

Computer hardware

Computer hardware includes the physical parts of a computer, such as the case, central processing unit (CPU), random access memory (RAM), monitor, mouse, keyboard, computer data storage, graphics card, sound card, speakers and motherboard. By contrast, software is the set of instructions that can be stored and run by hardware. Hardware is so-termed because it is "hard" or rigid with respect to changes, whereas software is "soft" because it is easy to change. Hardware is typically directed by the software to execute any command or instruction.

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Two Dimensional Array of Nanomechanical Membrane-type Surface Stress Sensor (MSS) with Improved Sensitivity

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