Publication

Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Annalisa De Pastina, Muhammad Faizan
2019
Conference Papers

Abstract

In a free ZY-LiNbO3 400nm thick platelet, narrow electrodes (500nm wide) placed periodically with a pitch of few micrometers can eXcite standing Bulk Acoustic shear wave Resonances (XBARs), by means of lateral electric field parallel to crystalline Y- axis. The resonance frequency of around 4.8GHz and 13.6GHz are suitable for development of RF filters. The XBARs 3rd, 5th and even 9th harmonics were observed up to 38 GHz.

Official source

https://infoscience.epfl.ch/entities/publication/43d65cb4-7c3c-42fa-91d4-f66711a42c0b

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Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters

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