Christophe Ballif, Laura Ding, Sylvain Nicolay, Grégory Bugnon
Ethanol is used as a precursor during the growth of zinc oxide (ZnO) by low-pressure chemical vapor deposition (LPCVD). By adding ethanol, the surface of the deposited ZnO layer is flattened and its roughness is decreased about sevenfold. The layers become ...
American Institute of Physics2013